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    • What are the main steps of the lithography process?

    * Question

    What are the main steps of the lithography process?


    *     Answer

    1.Gas phase to base film treatment

    2.Rotating glue

    3.Soft drying

    4.Alignment and exposure

    5.Post-exposure baking

    6.Development

    7.Hard film baking

    8.Post-development inspection


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